Thin film black coatings (IR absorbing)

Dear all,

 

Does anyone out there know a vendor or a process for depositing a thin black (or very dark) layer onto wafers?  We are seeking an IR-absorbing layer that can be deposited and patterned (likely through lift-off).  Any and all suggestions are welcome.

 

I am aware of "gold black" and "nickel black" - metal sputtered in a N2 atmosphere - but I heard that it deposits as a powdery material and therefore would be difficult to pattern, etc.  Please let me know if you have information otherwise, and especially if you know of a place to get service.

 

Other processes we have thought about and might consider: sputter deposition of carbon or any other dark film, or plasma etching of a metal surface to roughen it up to lower its reflectivity.

 

Any details or creative ideas would be welcome!

 

Best regards,

Alissa

 

 

 

Alissa M. Fitzgerald, Ph.D.

Managing Member

 

A.M. Fitzgerald & Associates, LLC

655 Skyway Suite 118

San Carlos, CA 94070

+1 (650) 592-6100 x101 phone

+1 (650) 592-6111 fax

www.amfitzgerald.com