Fwd: Glycol Chiller Down

Dear Labmembers:

As you can see from the attached, the power outage Friday night caused loss of the ability to control humidity in the lab for "about a week".  This means that there may be resist issues in lithography depending on the humidity for fine features.  Please inspect your wafers carefully if you are using the lithography equipment.

Paul Rissman

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Delivered-To: rissman@stanford.edu
Delivered-To: rissman@snf.stanford.edu
From: "Leonard Chan" <leonardc@bonair.stanford.edu>
To: <rissman@snf.stanford.edu>
Cc: <shott@snf.stanford.edu>, <mtang@snf.stanford.edu>,
        "Ed Myers" <edmyers@stanford.edu>
Subject: Glycol Chiller Down
Date: Mon, 10 Dec 2007 08:19:29 -0800
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Paul,

This is to inform you that we won't have dehumidification capability for
about a week.
I was told that the Cogen lost power to the cooling tower supplying water to
our Glycol
chillers. They will keep updated on their progress.

Thanks,

Leonard