Re: Vapor HF available?

there is a vapor HF station at wbnitride that works very well.
j

Quoting Masaharu Kobayashi <masaharu@stanford.edu>:

> Hello SNF members.
>
> I would like to ask you if vapor HF is available in SNF or not.
>
> Since there are a lot of MEMS people, I am expecting somebody use it.
>
> I really appreciate any information on vapor HF.
>
> Thank you
>
> Masaharu Kobayashi

~j