The o2 mfc is ok, the problem is with the pick and place
controller pcb. On service mode, set flow at 3slm(1.5vdc)
checked input on gas pcb is at 0vdc. Power down the tool
and reseated j3 connector on pick and place pcb, flowed
o2 on service mode from 1 to 10 slm and o2 is flowing.
Cycled wafers w/out problem.
Subscribe to:
Post Comments (Atom)
No comments:
Post a Comment