Gas flow1 problem has returned. The following is what ceaser found the last time. On service mode, set flow at 3slm(1.5vdc) checked input on gas pcb is at 0vdc. Power down the tool
and reseated j3 connector on pick and place pcb, flowed
o2 on service mode from 1 to 10 slm and o2 is flowing.
Cycled wafers w/out problem.
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