Comment gasonics SNF 2009-02-25 21:09:00: Wafer chip

While removing photoresist from bonded wafers,t one of the wafers had a small chip in it on removal from the machine. Bonding was apparently weak at the edge. The broken-off piece of wafer was in place and accounted for, but I am concerned that smaller splinters of wafer might be still in the machine. The machine seems to function normally.