Problem gasonics SNF 2011-01-12 17:03:49: Field service was here and they;

1) replaced and adjusted the indexers
2) calibrated gases
3) created a standard recipe (named 3) with the followinf parameters; O2 = 4.5, N2 = 0.5, lamp1 = 12sec, lamp2 = 60sec, lamp3 = 12sec, strip time = 60sec.
NOTE; the other recipes need to be checked and changed. Until that is complete, please use recipe #3 multiple times for thick or damaged resist.