Monday, August 29, 2011

Shutdown gasonics SNF 2011-08-29 14:36:39: "Lamp 2 fails" error

"Lamp 2 fails" error was showing in 3rd line of prompt screen while the tool was in hibernate mode. Loading a recipe and hitting start finishes the 30 seconds of "Warming up RF", then shows "lamp 2 fails" error again and prompts the user to abort.

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